JPH026183U - - Google Patents
Info
- Publication number
- JPH026183U JPH026183U JP1988084431U JP8443188U JPH026183U JP H026183 U JPH026183 U JP H026183U JP 1988084431 U JP1988084431 U JP 1988084431U JP 8443188 U JP8443188 U JP 8443188U JP H026183 U JPH026183 U JP H026183U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- laser beam
- laser
- alignment
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000009966 trimming Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988084431U JPH026183U (en]) | 1988-06-28 | 1988-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988084431U JPH026183U (en]) | 1988-06-28 | 1988-06-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH026183U true JPH026183U (en]) | 1990-01-16 |
Family
ID=31309120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988084431U Pending JPH026183U (en]) | 1988-06-28 | 1988-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH026183U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0458203U (en]) * | 1990-09-21 | 1992-05-19 | ||
| JP5089827B1 (ja) * | 2012-02-01 | 2012-12-05 | 三菱電機株式会社 | レーザ加工方法およびレーザ加工装置 |
-
1988
- 1988-06-28 JP JP1988084431U patent/JPH026183U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0458203U (en]) * | 1990-09-21 | 1992-05-19 | ||
| JP5089827B1 (ja) * | 2012-02-01 | 2012-12-05 | 三菱電機株式会社 | レーザ加工方法およびレーザ加工装置 |
| WO2013114593A1 (ja) * | 2012-02-01 | 2013-08-08 | 三菱電機株式会社 | レーザ加工方法およびレーザ加工装置 |
| CN103354770A (zh) * | 2012-02-01 | 2013-10-16 | 三菱电机株式会社 | 激光加工方法及激光加工装置 |
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